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Standards in the ASU Library: S: SEMI

List of available industry standards for organizations whose acronyms start with "S"

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standards labeled as: 

A:

    AA-AFPA

    AGA-ANS

    ANSI

    ANSLG-ARMA

    AS-AWWA

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Please note ...

The ASU Library's standards collection is intended for the use of ASU faculty, staff and currently enrolled students. 

Individuals not affliated with ASU who live in the Phoenix metropolitan area are welcome to come to the Noble Library on the Tempe campus to view the standards.  Items in the collection are not available for checkout or loan to other libraries; because of copyright restrictions, we do not provide photocopies or scanned copies to those unaffiliated with ASU.  

SEMI (Semiconductor Equipment and Materials International)

The following SEMI standards are available in paper copy in the Noble Library on the Tempe campus unless noted otherwise. Standards housed in Noble are "Library use only" and are not available for checkout.

  • Book of SEMI Standards (up to 1998) -- See TK7871.85 .S46a  Science Reference
  • SEMI E  10-0304 2004
  • SEMI E  58-0703 2003
  • SEMI E  79-0200 2000
  • SEMI E  79-0299 1999
  • SEMI E  79-0304 2004
  • SEMI E  79-1106 2006
  • SEMI E 116-0707 2007
  • SEMI E 124-1107 2007
  • SEMI M  40-0200 2000 (Guide for Measurement of Surface Roughness of Planar Surfaces on Silicon Wafer)
  • SEMI M  43-0301 2001 (Guide for Reporting Wafer Nanotopography)
  • SEMI MS 6-0308 2008 (Guide for Design and Materials for Interfacing Microfluidic Systems)
  • SEMI MS 7-0708 2008 (Specification for Microfluidic Interfaces to Electronic Device Packages)
  • SEMI S 2-1016a
  • SEMI S 6-0707E
  • SEMI S 10-0815E
  • SEMI S 12-0211E
  • SEMI S 21-1106E (Reapproved 0612)

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